Waferpedia

Comparison ledger

PN 159336 Below Wafer Detector Assy versus RS 75 Resistivity Mapper

KLA PN 159336 Below Wafer Detector Assy and KLA RS 75 Resistivity Mapper, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
PN 159336 Below Wafer Detector AssyKLA
RS 75 Resistivity MapperKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA PN 159336 Below Wafer Detector AssyKLA RS 75
Specifications
ConfigurationCompatible on the KLA 6400 and KLA 6420[1]220 Volts[2]
Voltage—120 V[3]
PN 159336 Below Wafer Detector Assy entryRS 75 Resistivity Mapper entry

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing