Comparison ledger
KLA PN 159336 Below Wafer Detector Assy, KLA UV 1280 SE Thin Film Thickness Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA PN 159336 Below Wafer Detector Assy | KLA UV 1280 SE Thin Film Thickness Measurement |
| Specifications | ||
| Configuration | Compatible on the KLA 6400 and KLA 6420[1] | Single phase[2] |
| Voltage | — | 200 V[2] |
| Power | — | 1.8 kW[2] |
| Wafer size | — | 12 inch[3] |
| Vintage (year of manufacture) | — | 2000[3] |
| Make | — | KLA[3] |
| Model | — | UV 1280 SE[3] |
| Wafer Sizes | — | 12 inch[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →