Comparison ledger
KLA PN 159336 Below Wafer Detector Assy and KLA UV 1280 SE Thin Film Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA PN 159336 Below Wafer Detector Assy | KLA UV 1280 SE Thin Film Thickness Measurement |
| Specifications | ||
| Configuration | Compatible on the KLA 6400 and KLA 6420[1] | Single phase[2] |
| Voltage | — | 200 V[2] |
| Power | — | 1.8 kW[2] |
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