Comparison ledger
KLA Prometrix UV 1250 SE Film Thickness Measurement and KLA UV 1280 SE Thin Film Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA UV 1250 SE | KLA UV 1280 SE Thin Film Thickness Measurement |
| Specifications | ||
| Phase | 1 Phase[1] | — |
| Configuration | 120 Volt[1] | Single phase[2] |
| Software Version | 2.4[1] | — |
| Robot Type | KLA H2D[1] | — |
| Voltage | — | 200 V[2] |
| Power | — | 1.8 kW[2] |
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