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Comparison ledger

Puma 9120 Darkfield Defect versus Surfscan 6420 Unpatterned Surface

KLA Puma 9120 Darkfield Defect and KLA Surfscan 6420 Unpatterned Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Puma 9120 Darkfield DefectKLA
Surfscan 6420 Unpatterned SurfaceKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA Puma 9120KLA Surfscan 6420
Specifications
ConfigurationRefurbished[1]16A[2]
Phase—1 phase[2]
Frequency—60 Hz[2]
Voltage—208V[2]
Puma 9120 Darkfield Defect entrySurfscan 6420 Unpatterned Surface entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing