Comparison ledger
KLA RS 75 TCA, Tenney , TPS JR-A-F4T Junior compact temperature test chambers, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | RS 75 TCAKLA | |
|---|---|---|
| OEM | KLA | Tenney |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA RS 75 | Tenney , TPS JR-A-F4T Junior compact temperature test chambers |
| Specifications | ||
| Voltage | 115 V[1] | — |
| Configuration | 1.8K Watts[2] | — |
| Model | RS 75 TCA[2] | JR-A-F4T[5] |
| Make | KLA[2] | — |
| Power | 115 V, 1.8K Watts, 50/60 Hz[2] | — |
| Frequency | 50/60 Hz[1] | — |
| Wafer size | 6 inch, 8 inch[1] | — |
| Wafer handling | 3 H type loader[1] | — |
| Type | Four Point Probe (4PP)[4] | — |
| Vintage | 1999-3[4] | — |
| Tool type | Four-point probe (4PP)[4] | — |
| Manufacturer | KLA[1] | Tenney[5] |
| Category | Test & Probe[1] | — |
| Equipment type | Resistivity system[1] | — |
| Probe head / loading | 3 H type loader[1] | — |
| Wafer handler | 100 mm to 200 mm dual-cassette wafer handler[4] | — |
| Flat finder | Included[1] | — |
| Chamber Size | — | 1.2 cubic feet[5] |
| Temperature Range | — | -68°C to +180°C[5] |
| Control | — | +/-1.0°C[5] |
| Short description | — | Junior compact temperature test chambers[5] |
| Control accuracy | — | +/-1.0°C[5] |
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