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Solid State versus UV 1280 SE Thin Film Thickness Measurement

KLA Solid State and KLA UV 1280 SE Thin Film Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Solid StateKLA
UV 1280 SE Thin Film Thickness MeasurementKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA Solid StateKLA UV 1280 SE Thin Film Thickness Measurement
Specifications
ConfigurationUpgrade for KLA AIT II & XP Series Systems[1]Single phase[2]
Voltage—200 V[2]
Power—1.8 kW[2]
Solid State entryUV 1280 SE Thin Film Thickness Measurement entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing