Comparison ledger
KLA Starlight 301 300 SL Inspection Measurement and KLA UV 1280 SE Thin Film Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Starlight 301 300 SL Inspection Measurement | KLA UV 1280 SE Thin Film Thickness Measurement |
| Specifications | ||
| Voltage | 208 Vac[1] | 200 V[2] |
| Configuration | 50/60 Hz[1] | Single phase[2] |
| Power | — | 1.8 kW[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →