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Surfscan 6420 Unpatterned Surface versus Surfscan SP 3 Particle Defect

KLA Surfscan 6420 Unpatterned Surface and KLA Surfscan SP 3 Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Surfscan 6420 Unpatterned SurfaceKLA
Surfscan SP 3 Particle DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Bare wafer inspection station
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA Surfscan 6420KLA Surfscan
Specifications
Phase1 phase[1]—
Frequency60 Hz[1]—
Voltage208V[1]—
Configuration16A[1]HDD not included[2]
Wafer size—Bare wafer inspection station[2]
Surfscan 6420 Unpatterned Surface entrySurfscan SP 3 Particle Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing