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Surfscan 6420 Unpatterned Surface versus UV 1280 SE Thin Film Thickness Measurement

KLA Surfscan 6420 Unpatterned Surface and KLA UV 1280 SE Thin Film Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Surfscan 6420 Unpatterned SurfaceKLA
UV 1280 SE Thin Film Thickness MeasurementKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA Surfscan 6420KLA UV 1280 SE Thin Film Thickness Measurement
Specifications
Phase1 phase[1]—
Frequency60 Hz[1]—
Voltage208V[1]200 V[2]
Configuration16A[1]Single phase[2]
Power—1.8 kW[2]
Surfscan 6420 Unpatterned Surface entryUV 1280 SE Thin Film Thickness Measurement entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing