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Comparison ledger

Surfscan SP 3 Particle Defect versus Tera Stay SLF 27 Reticle

KLA Surfscan SP 3 Particle Defect and KLA Tera Stay SLF 27 Reticle, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Surfscan SP 3 Particle DefectKLA
Tera Stay SLF 27 ReticleKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer sizeBare wafer inspection station—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA SurfscanKLA SLF
Specifications
ConfigurationHDD not included[1]1 Reticle loader[2]
Wafer sizeBare wafer inspection station[1]—
Surfscan SP 3 Particle Defect entryTera Stay SLF 27 Reticle entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing