Comparison ledger
Lam Research IPEC Avanti 472, Lapmaster 12 Lapper, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | IPEC Avanti 472Lam Research | 12 LapperLapmaster |
|---|---|---|
| OEM | Lam Research | Lapmaster |
| Category | CMP | CMP |
| Wafer size | Single wafer | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research IPEC | — |
| Specifications | ||
| Configuration | Fully automated[1] | — |
| Wafer size | Single wafer[2] | — |
| Manufacturer | Lam / IPEC[3] | — |
| Model | Avanti 472[3] | — |
| Equipment type | CMP (Chemical Mechanical Polisher)[3] | — |
| Wafer sizes | 4, 5, 6, 8 inch[1] | — |
| Automation | Fully automated[1] | — |
| Process capability | Capable of two-step polishing to maximize wafer processing capability and quality[1] | — |
| Configured wafer size | 150 mm wafers[4] | — |
| OEM | Lam / IPEC[1] | — |
| Category | CMP (Chemical Mechanical Polisher)[1] | — |
| Processing mode | Single wafer[1] | — |
| Polishing capability | Capable of two-step polishing[1] | — |
| Outside plate diameter | — | 12 inches[5] |
| Lapping Speed Range | — | 0 to 60 rpm[6] |
| Wafer Size Compatibility | — | 4 inches or smaller[5] |
| Input Voltage | — | 110 V[5] |
| Frequency | — | 60 Hz[5] |
| Phase | — | 1[5] |
| Number of Rings | — | 3[5] |
| Number of Weights | — | 3[5] |
| Includes Slurry System | — | Yes[5] |
| Includes Timer | — | Yes[5] |