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Comparison ledger

IPEC Avanti 472versus1 DP 41

Lam Research IPEC Avanti 472, Logitech 1 DP 41, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
IPEC Avanti 472Lam Research
1 DP 41Logitech
OEMLam ResearchLogitech
CategoryCMPCMP
Wafer sizeSingle wafer—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research IPECLogitech 1 DP 41
Specifications
ConfigurationFully automated[1]50/60 Hz[5]
Wafer sizeSingle wafer[2]—
ManufacturerLam / IPEC[3]—
ModelAvanti 472[3]1 DP 41[5]
Equipment typeCMP (Chemical Mechanical Polisher)[3]—
Wafer sizes4, 5, 6, 8 inch[1]—
AutomationFully automated[1]—
Process capabilityCapable of two-step polishing to maximize wafer processing capability and quality[1]—
Configured wafer size150 mm wafers[4]—
OEMLam / IPEC[1]—
CategoryCMP (Chemical Mechanical Polisher)[1]—
Processing modeSingle wafer[1]—
Polishing capabilityCapable of two-step polishing[1]—
Phase—3 Phase[5]
Voltage—480 V[5]
Make—Logitech[5]
Frequency—50/60 Hz[5]
Current—12 amps[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]yorkscientific.comyorkscientific.com
  5. [5]inventory listing