Comparison ledger
Lam Research SEZ 102, Semitool 003163-000 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SEZ 102Lam Research | 003163-000 SRDSemitool |
|---|---|---|
| OEM | Lam Research | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research SEZ | Semitool 003163-000 SRD |
| Specifications | ||
| Voltage | 208 Vac[1] | — |
| Phase | 3 Phase[1] | — |
| Configuration | 50 A[1] | — |
| Manufacturer | Lam Research[2] | — |
| Model | 102[1] | 003163-000[3] |
| Wafer Size | 6 inch[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Current | 50 A[1] | — |
| Make | — | Semitool[3] |
| Equipment type | — | Spin Rinse Dryer (SRD)[3] |
| Asset # | — | 139375[3] |
| Last Confirm Date | — | September 03, 2025[3] |
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