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Comparison ledger

12 Lapperversus6 DE 4 Spindle

Lapmaster 12 Lapper, Strasbaugh 6 DE 4 Spindle, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
12 LapperLapmaster
6 DE 4 SpindleStrasbaugh
OEMLapmasterStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Strasbaugh 6 DE 4 Spindle
Specifications
Outside plate diameter12 inches[1]—
Lapping Speed Range0 to 60 rpm[2]—
Wafer Size Compatibility4 inches or smaller[1]—
Input Voltage110 V[1]—
Frequency60 Hz[1]—
Phase1[1]—
Number of Rings3[1]—
Number of Weights3[1]—
Includes Slurry SystemYes[1]—
Includes TimerYes[1]—
Configuration—4 Bank Overarm[3]
Spindles—4[3]
Category—CMP[3]
Type—CMP polisher[3]
Product title—Strasbaugh 6 DE 4 Spindle Polisher[4]
Make—Strasbaugh[4]
Model—6 DE 4[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]jmind.comjmind.com
  2. [2]etd.ohiolink.eduetd.ohiolink.edu
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing