Comparison ledger
Lapmaster 12 Lapper, Strasbaugh 6 DS SP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 12 LapperLapmaster | 6 DS SPStrasbaugh |
|---|---|---|
| OEM | Lapmaster | Strasbaugh |
| Category | CMP | CMP |
| Wafer size | — | Single Wafer SiC Substrate |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Strasbaugh 6 DS SP |
| Specifications | ||
| Outside plate diameter | 12 inches[1] | — |
| Lapping Speed Range | 0 to 60 rpm[2] | — |
| Wafer Size Compatibility | 4 inches or smaller[1] | — |
| Input Voltage | 110 V[1] | — |
| Frequency | 60 Hz[1] | 60 Hz[4] |
| Phase | 1[1] | 3 Phase[4] |
| Number of Rings | 3[1] | — |
| Number of Weights | 3[1] | — |
| Includes Slurry System | Yes[1] | — |
| Includes Timer | Yes[1] | — |
| Configuration | — | Multi Process[3] |
| Voltage | — | 208 V, 3 Phase, 60 Hz[4] |
| Full Load | — | 60 A[4] |
| Motor | — | 36 A[4] |
| Interrupting Capacity | — | 10,000 A[4] |
| Wafer size | — | Single Wafer SiC Substrate[4] |
| Make | — | Strasbaugh[3] |
| Model | — | 6 DS SP[3] |
| Equipment type | — | CMP (Chemical Mechanical Polisher)[3] |
| Wafer sizes | — | 8 inch[3] |
| Operating voltage | — | 208 V[4] |
| Full load current | — | 60 A[4] |
| Motor current | — | 36 A[4] |
| Automation | — | Fully automated[4] |
| Material | — | Single Wafer SiC Substrate[4] |
| Wafer carriers | — | 2 x 150 mm wafer carriers; 1 x 150 mm wafer carriers[4] |
| Carrier rebuild kit | — | Acid resistance carrier rebuild kit[4] |
| Temperature control | — | Table temperature control unit (SMC chiller)[4] |
| Loading | — | Two cassette slots for loading[4] |
| Unloading | — | Two cassette slots for unloading[4] |
| Polish mode | — | Single sided polish[4] |
| Polish modules | — | 1 polish module equipped with dedicated hardware[4] |
| Pad conditioning | — | Programmable pad conditioning[4] |
| Spindle | — | Overam spindle with 4 passage rotary union[4] |
| Slurry dosing | — | Slurry perilstatic pump dosing on the table[4] |
| Vacuum | — | Universal vacuum pump[4] |