Waferpedia

Comparison ledger

36versus100R16

Lapmaster 36, Strasbaugh 100R16, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
36Lapmaster
100R16Strasbaugh
OEMLapmasterStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 36Strasbaugh 100R16
Cited variants
  • Pneumatic Lift Version[1]
  • Open Face Version[1]
—
Specifications
Phase3 Phase[2]—
ConfigurationTwo Rings Pump[3]—
Model Type36[1]—
Number of Conditioning Rings3[1]—
Drive Motor4 kW (5 HP)[1]—
Standard Lap Plate Speed58 rpm[1]—
Lapping Plate Outer Diameter36 inches (914 mm)[1]—
Lapping Plate Inner Diameter6.75 inches (172 mm)[1]—
Conditioning Ring Outer Diameter419 mm (16.5 inches)[1]—
Conditioning Ring Inner Diameter368 mm (14.5 inches)[1]—
Wear Life2.8 inches (70 mm)[1]—
Weight1202 kg (2650 lbs)[1]—
Shipping Weight1383 kg (3050 lbs)[1]—
Power Supply230 V/460 V, 3 phase, 60 Hz[1]—
type—1 spindle grinder/polisher[4]
drive system—DC drive system with 2 motors[4]
spindle RPM—1-180 RPM[4]
eccentric RPM—1-90 RPM[4]
controls—digital timer; air down switch; spindle and eccentric speed dials; air regulators[4]
capacity—16 inches[4]
spindle size—1-8 TPI[4]
overall dimensions—28 inches x 36 inches x 48 inches[4]
weight—500 lbs[4]
origin—made in the USA[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]excelltechnology.comexcelltechnology.com