Comparison ledger
Laurell WS-650-15 B, Laurell WS-650-15B, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | WS-650-15 BLaurell | WS-650-15BLaurell |
|---|---|---|
| OEM | Laurell | Laurell |
| Category | Resist Processing | Resist Processing |
| Wafer size | 300mm | 300mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Laurell WS-650-15 B | Laurell WS-650-15B |
| Specifications | ||
| Type | Spin Coater[1] | — |
| Controller | 650-series[1] | — |
| Max Substrate Size | ø 300mm (9" × 9")[1] | — |
| Max RPM | 12000 rpm[1] | 12,000 rpm[3] |
| Mounting Options | Tabletop, In-Deck, On-Deck[1] | — |
| OEM | Laurell[2] | — |
| Model | WS-650-15 B[2] | — |
| Series | 650-series[2] | 650 Series[3] |
| Max substrate size | ø 300mm wafers and 9" × 9" (229mm × 229mm) substrates[2] | 300mm (9" x 9")[3] |
| Category | Spin Coater[1] | — |
| Processes supported | Coating, Etching, Developing, Rinsing-Drying and Cleaning[2] | — |
| Model type | — | spin coater[3] |
| Mounting options | — | Tabletop, In-Deck, On-Deck[3] |
Plan your fab
Building a Resist Processing process? Get a complete equipment list.
Open the fab equipment planner →