Waferpedia

Comparison ledger

DM800 versus INM100

Leica DM800 and Leica INM100, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
DM800Leica
INM100Leica
OEMLeicaLeica
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyLeica DM800Leica INM100
Specifications
TypeInspection microscope with digital camera[1]
ModelLeica DM800[1]
LocationsZ01, Z02, Z06, Z07, Z11, Z15, Z18[1]
AccessoriesYellow filter; DIC; IR BS light[1]
Accessory noteZ01 and Z15 only; Z02 only[1]
Equipment typeMicroscope[2]
SectionUV Microscopy and Imaging[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.ch
  2. [2]nanolab.berkeley.edunanolab.berkeley.edu