Waferpedia

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D 8 B Vacuumversus03 RR 8120-001-001 Wafer Exchanger

Leybold D 8 B Vacuum, Rorze 03 RR 8120-001-001 Wafer Exchanger, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMLeyboldRorze
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLeybold D 8 B VacuumRorze 03 RR 8120-001-001 Wafer Exchanger
Cited variants—
Specifications
Configuration115/230V[2]—
Volume Flow Rate8 m3/h[3]—
OEMLeybold[2]—
ModelD 8 B[2]03 RR 8120-001-001[4]
TypeTRIVAC-B oil-sealed rotary vane pump[1]—
Stage configurationDual-stage[1]—
Nominal pumping speed8 m3/h[1]—
ConnectionsDN 16 KF[1]—
Oil grades statedN 62, HE-200, Arctic oil SHC 224[1]—
Motor variants statedSingle-phase AC and three-phase AC[1]—
Operating temperature range12 to 40 °C[1]—
Wafer size—8 inch[4]
Manufacturer—Rorze[4]
Equipment type—Wafer Exchanger[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]idealvac.comidealvac.com
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]Equipment inventory listing
  5. [5]waferpedia.comwaferpedia.com