Waferpedia

Comparison ledger

Trivac D 16 A Rotary Vaneversus-Mist 850 Electronic Air Filter

Leybold Trivac D 16 A Rotary Vane, Tri -Mist 850 Electronic Air Filter, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMLeyboldTri
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLeybold Trivac D 16Tri -Mist 850 Electronic Air Filter
Specifications
ConfigurationHE 175[1]—
TypeRotary Vane Pump[1]—
FluidHE 175 - M-20 Hydrocarbon vacuum pump fluid[1]—
Displacement14.1 CFM[1]—

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing