Waferpedia

Comparison ledger

05 LHP 151versusDVD400

Melles Griot 05 LHP 151, Zygo DVD400, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
05 LHP 151Melles Griot
DVD400Zygo
OEMMelles GriotZygo
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system—Windows XP
Generation——
FamilyMelles Griot 05Zygo DVD400
Specifications
ConfigurationWith 05 LPL 340 Power Supply (Does not power on)[1]—
Equipment typeLaser[1]—
MakeMelles Griot[1]—
Model05 LHP 151[1]—
Power stateDoes not power on[1]—
Measurement type—High-accuracy, noncontact measurements of transmitted-wavefront quality[3]
Target lens size—Small lenses, 1.5 to 6 mm[3]
Laser wavelength—405 ±5 nm[3]
Laser type—Laser diode, externally mounted, fiber coupled[3]
Maximum output power—≤ 2 milliwatts[3]
Output power at instrument aperture—≤ 1 milliwatt[3]
Beam polarization—Selectable: circular, horizontal, or vertical[3]
Coherence length—≥ 1 m[3]
Laser classification—Class II[3]
Magnifications—1X, 2X, and 4X[3]
Test beam diameter—6 mm at 1X, 3 mm at 2X, 1.5 mm at 4X[3]
Working distance—41 - 116 mm at 1X[3]
Optical centerline—4.25 in (108 mm)[3]
Alignment system—Twin spot, retroreflector assist, no reticle[3]
Spatial sampling—512 x 480 pixels (6 mm clear aperture at 1X zoom)[3]
Data acquisition time—230 ms (low resolution, 5 frames of data)[3]
Digitization—8 bits[3]
System quality—Plano testing 4 λ/10; transmitted wavefront testing λ/10[3]
Operating temperature—15 to 30°C (59 to 86°F)[3]
Rate of temperature change—< 1.0°C/15 minutes[3]
Humidity—5 to 95% relative, non-condensing[3]
Vibration isolation—1 Hz < freq < 120 Hz[3]
Software—MetroPro metrology software[3]
Operating system—Microsoft Windows XP[3]
Type—Fizeau interferometer system[3]
Measurement—high-accuracy, noncontact transmitted-wavefront quality measurement[3]
Target part size—small lenses (1.5 - 6 mm)[3]
Light source—405 nm laser diode light source[3]
Operating environment temperature—15 to 30°C (59 to 86°F)[3]

Plan your fab

Building a Precision Optics process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]web.archive.orgweb.archive.org