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SMC 100 Series Motion Controller Driverversus150 e Mask

Newport SMC 100 Series Motion Controller Driver, SUSS MicroTec 150 e Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
150 e MaskSUSS MicroTec
OEMNewportSUSS MicroTec
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyNewport SMC 100 Series Motion Controller DriverSUSS MicroTec 150 e Mask
Cited variants—
Specifications
Command Set40+ intuitive, 2-letter ASCII commands[1]—
Computer InterfacesRS-232-C; USB compatible with external SMC-USB adapter[1]—
Control AlgorithmFloating point digital PID loop with velocity and friction feed forward, 2kHz servo rate; backlash and hysteresis compensation[1]—
Drive TypeDC servo motors in open or closed loop (CC model); Open-loop stepper motors control (PP model)[1]—
ESP CompatibilityESP Stage Detection[1]—
MotionPoint-to-point motion with s-gamma motion profiler allowing acceleration and jerk time control[1]—
Motor ControlCC model: 48 VDC @ 1.5 A rms, 3 A peak; PP model: 48 VDC @ 1.1 A rms per phase; 100 kHz PWM switching frequency[1]—
Number of Axis1[1]—
InterfaceTwo-color LED[1]—
Dimensions33 H x 161 W x 140 D (mm)[1]—
I/O4 TTL out; 4 TTL in; 1 analog input[1]—
SoftwareWindows Utility program; LabVIEW drivers[1]—
FeaturesDaisy-chain up to 31 Controllers[1]—
TypeSingle-axis motion controller/driver for DC or stepper motor[2]—
Communication interfacesRS232, USB (via RS232C to USB converter), RS485[2]—
Max controllers in daisy chain31[2]—
Power supply input100-240 VAC[2]—

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Sources (2)Every fact above is drawn from these public sources
  1. [1]newport.comnewport.com
  2. [2]api.p1.mks.comapi.p1.mks.com