Comparison ledger
Nikon 1505 G 6 E, Trumpf TruLaser Station 5005 Pulsed Welding, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1505 G 6 ENikon | |
|---|---|---|
| OEM | Nikon | Trumpf |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | 1988– | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nikon 1505 | Trumpf TruLaser Station 5005 Pulsed Welding |
| Specifications | ||
| Configuration | 5" reticle[1] | TruLaser Station 5005 Includes:[4] |
| Resolution | 650 nm[2] | — |
| Numerical Aperture | 0.54[2] | — |
| Reduction | 5x[2] | — |
| Exposure Field | 15 x 15 mm[2] | — |
| Alignment Accuracy | 130 nm[2] | — |
| Wafer Size | 4 inch[1] | — |
| Light Source | g-line[3] | — |
| Introduction Year | 1988[2] | — |
| NA (Numerical Aperture) | 0.54[2] | — |
| Make | Nikon[1] | — |
| Model | 1505 G 6 E[1] | — |
| Category | Stepper[1] | — |
| Wafer Sizes | 4 inch[1] | — |
| Exposure type | g-line[2] | — |
| NA | 0.54[2] | — |
| Exposure field | 9.3 x 18.8 mm[2] | — |
| Control | — | B&R with TRUMPF HMI[4] |
| Two fibers attached | — | 20m LLK- B – 02/20M[4] |
| Laser type | — | Flash lamp pumped[4] |
| Laser class | — | Class 1[4] |
| Axis travel (Z) | — | 500 mm[4] |
| Control system | — | B&R with TRUMPF HMI[4] |
| Safety enclosure | — | Yes[5] |
| Automatic lift door | — | Yes[5] |
| Observation window | — | Yes[5] |
| Touch control panel | — | Swivel-mounted[4] |
| Integrated switch cabinet | — | Yes[5] |
| Beam delivery fibers (attached) | — | 20m LLK-B – 02/20M[4] |
| Beam delivery fibers (additional) | — | 100m LLK-B – 02/100M, 4m LLK-B – 04/4M, 15m LLK-B – 06/15M[4] |
| Welder/cutter with scanner | — | Yes[4] |
| Custom optical assemblies | — | Yes[4] |
| Laser machine | — | Laser welding machine with safety enclosure[4] |
| Axis travel | — | Z = 500 mm[4] |
| Swivel-mounted touch control panel | — | Included[5] |
| Beam delivery | — | Through fibers[5] |
| Attached fibers | — | Two fibers attached: 20m LLK- B – 02/20M[4] |
| Additional fibers | — | 100m LLK- B – 02/100M; 4m LLK- B – 04/4M; 15m LLK- B – 06/15M[4] |
| TruPulse laser | — | TruPulse 62 Pulsed Laser[4] |
| Welder/cutter | — | Welder/cutter with scanner[4] |
| Optics | — | Custom optical assemblies[4] |
| Process fibers | — | Several process fibers[4] |
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