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Eclipse L 200 N Optical versus NRM 3100 SP+ Overlay Measurement

Nikon Eclipse L 200 N Optical and Nikon NRM 3100 SP+ Overlay Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Eclipse L 200 N OpticalNikon
NRM 3100 SP+ Overlay MeasurementNikon
OEMNikonNikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyNikon Eclipse L 200Nikon NRM 3100 SP+ Overlay Measurement
Specifications
Configuration16M Pixel Camera[1]50/60 Hz[2]
Phase—1 Phase[2]
Eclipse L 200 N Optical entryNRM 3100 SP+ Overlay Measurement entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing