Waferpedia

Comparison ledger

Eclipse LV 50 versus Optistation 3100 Wafer

Nikon Eclipse LV 50 and Nikon Optistation 3100 Wafer, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMNikonNikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyNikon EclipseNikon Optistation
Specifications
ConfigurationMetrology[1]50/60Hz[2]
Phase1 Phase[2]
Voltage200V[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing