Waferpedia

Comparison ledger

LV100ND versus LV150

Nikon LV100ND and Nikon LV150, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
LV100NDNikon
LV150Nikon
OEMNikonNikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyNikon LV100NDNikon LV150
Specifications
Microscope typeOptical microscope[1]
LightingTop and bottom lighting using LED white light with adjustable intensity[1]
Objectives5X, 10X, 20X, 50X, and 100X Plan Fluor high numerical aperture lenses[1]
Brightfield / darkfield10X Ultra Wide Field brightfield and darkfield for all five lenses[1]
DICSelectable Nomarski Differential Interference Contrast for top-down lighting only[1]
Stage6" x 4" XY stage with glass plate[1]
CondenserAbbe condenser[1]
CameraDS-Ri2 Nikon camera, high definition 18 megapixel[1]
SoftwareNikon NIS-Elements D Software[1]
Instrument count and locationsTwo microscopes in the Flexible Cleanroom and two in the Nanopatterning Cleanroom[1]
modelNikon LV150[2]
listed nameNikon Eclipse LV150 microscope[2]
locationZ13[2]
accessoriesDIC[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]snsf.stanford.edusnsf.stanford.edu
  2. [2]epfl.chepfl.ch