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LV100ND versus Optiphot

Nikon LV100ND and Nikon Optiphot, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
LV100NDNikon
OEMNikonNikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyNikon LV100NDNikon Optiphot
Specifications
Microscope typeOptical microscope[1]
LightingTop and bottom lighting using LED white light with adjustable intensity[1]
Objectives5X, 10X, 20X, 50X, and 100X Plan Fluor high numerical aperture lenses[1]
Brightfield / darkfield10X Ultra Wide Field brightfield and darkfield for all five lenses[1]
DICSelectable Nomarski Differential Interference Contrast for top-down lighting only[1]
Stage6" x 4" XY stage with glass plate[1]
CondenserAbbe condenser[1]
CameraDS-Ri2 Nikon camera, high definition 18 megapixel[1]
SoftwareNikon NIS-Elements D Software[1]
Instrument count and locationsTwo microscopes in the Flexible Cleanroom and two in the Nanopatterning Cleanroom[1]
Configurationwith Camera[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]snsf.stanford.edusnsf.stanford.edu
  2. [2]inventory listing