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Comparison ledger

LV100ND versus SMZ-1

Nikon LV100ND and Nikon SMZ-1, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
LV100NDNikon
SMZ-1Nikon
OEMNikonNikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyNikon LV100NDNikon SMZ-1
Cited variants
Specifications
Microscope typeOptical microscope[2]
LightingTop and bottom lighting using LED white light with adjustable intensity[2]
Objectives5X, 10X, 20X, 50X, and 100X Plan Fluor high numerical aperture lenses[2]
Brightfield / darkfield10X Ultra Wide Field brightfield and darkfield for all five lenses[2]
DICSelectable Nomarski Differential Interference Contrast for top-down lighting only[2]
Stage6" x 4" XY stage with glass plate[2]
CondenserAbbe condenser[2]
CameraDS-Ri2 Nikon camera, high definition 18 megapixel[2]
SoftwareNikon NIS-Elements D Software[2]
Instrument count and locationsTwo microscopes in the Flexible Cleanroom and two in the Nanopatterning Cleanroom[2]
TypeBinocular microscope[3]
LocationZ09[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]manualslib.commanualslib.com
  2. [2]snsf.stanford.edusnsf.stanford.edu
  3. [3]epfl.chepfl.ch