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Comparison ledger

LV150 versus NRM 3100 SP+ Overlay Measurement

Nikon LV150 and Nikon NRM 3100 SP+ Overlay Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
LV150Nikon
OEMNikonNikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyNikon LV150Nikon NRM 3100 SP+ Overlay Measurement
Specifications
modelNikon LV150[1]
listed nameNikon Eclipse LV150 microscope[1]
locationZ13[1]
accessoriesDIC[1]
Phase1 Phase[2]
Configuration50/60 Hz[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.ch
  2. [2]inventory listing