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NRM 3100 SP+ Overlay Measurement versus Optistation 3 Wafer

Nikon NRM 3100 SP+ Overlay Measurement and Nikon Optistation 3 Wafer, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
NRM 3100 SP+ Overlay MeasurementNikon
Optistation 3 WaferNikon
OEMNikonNikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—1994 Vintage
Control system——
Generation——
FamilyNikon NRM 3100 SP+ Overlay MeasurementNikon Optistation
Specifications
Phase1 Phase[1]—
Configuration50/60 Hz[1]Cassette to cassette handling[2]
NRM 3100 SP+ Overlay Measurement entryOptistation 3 Wafer entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing