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NRM 3100 SP+ Overlay Measurement versus SMZ-2B

Nikon NRM 3100 SP+ Overlay Measurement and Nikon SMZ-2B, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
NRM 3100 SP+ Overlay MeasurementNikon
SMZ-2BNikon
OEMNikonNikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyNikon NRM 3100 SP+ Overlay MeasurementNikon SMZ-2B
Specifications
Phase1 Phase[1]—
Configuration50/60 Hz[1]—
OEM—Nikon[2]
Model—SMZ-2B[2]
Section—Binocular Model[2]
Location—Z17[2]
NRM 3100 SP+ Overlay Measurement entrySMZ-2B entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]epfl.chepfl.ch