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Comparison ledger

NSR S 204 B Step and Repeatversus1000 Family

Nikon NSR S 204 B Step and Repeat, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1000 FamilyUltratech
OEMNikonUltratech
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyNikon NSR S 204Ultratech 1000 Family
Specifications
Phase3 Phase[1]—
Configuration3 Wire[1]—
OEMNikon[1]—
ModelNSR S 204 B[1]—
Equipment typeStep and Repeat System[1]—
Power3 Phase - 3 Wire - 50/60 Hz[1]—
Vintage2000 Vintage[1]—
Power supply3 Phase, 3 Wire, 50/60 Hz[1]—
System typeStep and Repeat[1]—
ConditionParts machine[1]—
Tool type—Photolithography step-and-repeat 1X stepper[4]
Optical design—Wynne Dyson[4]
Magnification—1X[4]
Tool class—Photolithography step-and-repeat 1X steppers[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]Equipment inventory listing
  4. [4]en.wikipedia.orgen.wikipedia.org