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Comparison ledger

Exceed 2000 AHversus0216 7696, E 11368072 ESC

Nissin Exceed 2000 AH, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMNissinVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyNissin Exceed 2000Varian 0216 7696, E 11368072 ESC
Specifications
GasAr, Arsenic, BF3, PH3[1]—
OSJDOS[1]—
Operating SystemJDOS 1998 Vintage[1]—
Configuration—Platen ADV-S Type[2]
Type—ESC Platen ADV-S Type[2]
Category—Ion Implantation[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com