Waferpedia

Comparison ledger

IMP HEAT Medium Currentversus160 XP

Nissin IMP HEAT Medium Current, Varian 160 XP, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
160 XPVarian
OEMNissinVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyNissin IMP HEAT Medium CurrentVarian 160 XP
Cited variants—
Specifications
MakeNissin[2]—
ModelIMP HEAT[2]—
Wafer Sizes6 inch[2]—
Configuration (160 XP Ion variant)—150mm High Current IMP[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing