Waferpedia

Comparison ledger

CX 21 versus OLS 5100 SAF

Olympus CX 21 and Olympus OLS 5100 SAF, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
CX 21Olympus
OEMOlympusOlympus
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyOlympus CX 21Olympus OLS
Specifications
Configuration10X eye pieces[1]High magnification[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing