Comparison ledger
Olympus MX 51 F and Olympus MX 61 L F 300 MM, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | MX 51 FOlympus | MX 61 L F 300 MMOlympus |
|---|---|---|
| OEM | Olympus | Olympus |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Olympus MX 51 F | Olympus MX 61 |
| Specifications | ||
| Configuration | — | 14x12 stage[1] |
| Option | — | Lumenera Infinity 2-3C, 3.3 megapixel Digital CCD Camera with PC and software[1] |
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