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Comparison ledger

MX 61 L F 300 MM versus OLS 5100 SAF

Olympus MX 61 L F 300 MM and Olympus OLS 5100 SAF, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
MX 61 L F 300 MMOlympus
OLS 5100 SAFOlympus
OEMOlympusOlympus
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyOlympus MX 61Olympus OLS
Specifications
Configuration14x12 stage[1]High magnification[2]
OptionLumenera Infinity 2-3C, 3.3 megapixel Digital CCD Camera with PC and software[1]—
MX 61 L F 300 MM entryOLS 5100 SAF entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing