Comparison ledger
Olympus MX 61 L F 300 MM and Olympus OLS5000, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | MX 61 L F 300 MMOlympus | OLS5000Olympus |
|---|---|---|
| OEM | Olympus | Olympus |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Olympus MX 61 | Olympus OLS5000 |
| Specifications | ||
| Configuration | 14x12 stage[1] | — |
| Option | Lumenera Infinity 2-3C, 3.3 megapixel Digital CCD Camera with PC and software[1] | — |
| Equipment type | — | optical microscope[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →