Waferpedia

Comparison ledger

S2-ET versus scope1

Olympus S2-ET and Olympus scope1, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
S2-ETOlympus
scope1Olympus
OEMOlympusOlympus
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyOlympus S2-ETOlympus scope1
Specifications
ManufacturerOlympus[1]
ModelS2-ET[1]MX61A[2]
Listed categoryOptical Microscopes[1]
Described aslight microscope[1]
VendorOlympus[2]
PurposeSemiconductor microscope for sample inspection and documentation[2]
Observation methodsBrightfield and darkfield[2]
Objectives5x, 20x, 50x, 100x, and 150x objectives on motorized turret[2]
Stage focusMotorized stage focus[2]
Digital imagingSteam Motion software for calibrated measurements[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]emsal.nanofab.utah.eduemsal.nanofab.utah.edu
  2. [2]uwaterloo.cauwaterloo.ca