Waferpedia

Comparison ledger

800 Plus versus Ion Beam

Oxford Instruments 800 Plus and Oxford Instruments Ion Beam, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
800 PlusOxford Instruments
Ion BeamOxford Instruments
OEMOxford InstrumentsOxford Instruments
CategoryDepositionDeposition
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyOxford Instruments Plasmalab 800Oxford Instruments Ion Beam
Specifications
Configuration50/60 Hz[1]DC Hot Wire Filament Ion-Guns[2]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing