Waferpedia

Comparison ledger

Ion Beam versus Plasmalab 800 Plus

Oxford Instruments Ion Beam and Oxford Instruments Plasmalab 800 Plus, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
Ion BeamOxford Instruments
Plasmalab 800 PlusOxford Instruments
OEMOxford InstrumentsOxford Instruments
CategoryDepositionDeposition
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyOxford Instruments Ion BeamOxford Instruments Plasmalab 800
Specifications
ConfigurationDC Hot Wire Filament Ion-Guns[1]Nitride[2]
Voltage208 V[2]
Frequency60 Hz[2]
Phase3+ Neutral / earth[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing