Waferpedia

Comparison ledger

Ionfab 300 Plus IBD versus PECVD3

Oxford Instruments Ionfab 300 Plus IBD and Oxford Instruments PECVD3, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
Ionfab 300 Plus IBDOxford Instruments
PECVD3Oxford Instruments
OEMOxford InstrumentsOxford Instruments
CategoryDepositionDeposition
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyOxford Instruments Ionfab 300Oxford Instruments PECVD3
Specifications
ContaminationII-VI[1]
No longer FunctioningSoftware, Automata[1]
OEMOxford Instruments[2]
ModelPECVD3[2]
Equipment listingOxford Plasmalab System 100 PECVD System[2]
Process manual referencePECVD Overview from Oxford Instruments[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]nanolab.berkeley.edunanolab.berkeley.edu
  3. [3]nanolab.berkeley.edunanolab.berkeley.edu