Waferpedia

Comparison ledger

Plasmalab 133 versus Plasmalab 800 Plus

Oxford Instruments Plasmalab 133 and Oxford Instruments Plasmalab 800 Plus, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
Plasmalab 133Oxford Instruments
Plasmalab 800 PlusOxford Instruments
OEMOxford InstrumentsOxford Instruments
CategoryDepositionDeposition
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyOxford Instruments PlasmalabOxford Instruments Plasmalab 800
Specifications
Frequency50 Hz[1]60 Hz[2]
Voltage415 Vac 3[1]208 V[2]
ConfigurationNitride[2]
Phase3+ Neutral / earth[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing