Waferpedia

Comparison ledger

Alcatel 2033 Rotary Vaneversus-Mist 850 Electronic Air Filter

Pfeiffer Alcatel 2033 Rotary Vane, Tri -Mist 850 Electronic Air Filter, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
OEMPfeifferTri
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyPfeiffer AlcatelTri -Mist 850 Electronic Air Filter
Cited variants—
Specifications
ConfigurationServiced with Alcatel TA101 Thermocouple[2]—
Model2033[2]—
MakePfeiffer / Alcatel[2]—
DescriptionRotary vane pump[2]—
TypeMechanical forepumps[1]—
Number of stages2[3]—
Nominal rotational speed1,500 rpm[3]—
Nominal pumping speed30 m3/h (23.3 cfm) at 50Hz[3]—
Pneurop pumping speed27 m3/h (18.8 cfm) at 50Hz[3]—
Ultimate partial pressure2 x 10^-4 mbar[3]—
Ultimate total pressure open gas ballast2 x 10^-2 mbar[3]—
Oil capacity3.6 liters[3]—
Weight61 kg (134 lbs)[3]—
Inlet and outlet flangesISO-KF DN 40[3]—
Serviced withAlcatel TA101 Thermocouple[2]—
Gas ballastManual gas ballast[3]—
OEMPfeiffer / Alcatel[2]—
CategoryVacuum pump / vacuum forepump[1]—
Stages2[1]—
Free air displacement35 m3/h at 50 Hz; 65 m3/h at 60 Hz[1]—
Air displacement (Pneurop method)30 m3/h at 50 Hz; 60 m3/h at 60 Hz[1]—
Base pressure without gas ballast< 1.10-4 mbar at 50 Hz; < 2.10-4 mbar at 60 Hz[1]—
Base pressure with gas ballast< 5.10-3 mbar[1]—
Maximum permissible water vapor pressure30 mbar at 50 Hz; 25 mbar at 60 Hz[1]—
Inlet and outletNW 40 Pneurop nipples[1]—
Manual gas ballast accessory part number068391[1]—
Oil mist eliminator accessory part number068442[1]—
Dust filter accessory part number068480[1]—
Liquid nitrogen trap accessory part number786537[1]—
Pump typeMechanical forepump[1]—
Frequency50 Hz / 60 Hz[1]—
ApplicationNeutral or normal atmosphere gases[1]—

Plan your fab

Building a Lab & Support Equipment process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]idealvac.comidealvac.com
  2. [2]inventory listing
  3. [3]ptbsales.comptbsales.com