Comparison ledger
Pfeiffer Alcatel Drytel 31 Vacuum, Tri -Mist 850 Electronic Air Filter, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Alcatel Drytel 31 VacuumPfeiffer | |
|---|---|---|
| OEM | Pfeiffer | Tri |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Pfeiffer Alcatel | Tri -Mist 850 Electronic Air Filter |
| Specifications | ||
| Configuration | Working but needs to be rebuilt (kit provided)[1] | — |
| Pump type | Oil-free turbo drag high vacuum pumping system[2] | — |
| Pump configuration | Turbo drag pump backed by diaphragm pump[3] | — |
| Inlet flange | DN 63 ISO-K[3] | — |
| Exhaust flange | DN 16 ISO-KF[4] | — |
| Pumping speed | 7.5 l/s[3] | — |
| Ultimate pressure | 1 x 10^-6 Torr[3] | — |
| Operating voltage | 115 VAC / 60 Hz[3] | — |
| Air cooling | Fully air cooled with an internal cooling fan[3] | — |
| Operating range | From atmosphere to 5x10-6 mbar[3] | — |
| Maximum chamber size | Up to 50 liters[5] | — |
| Maximum pumping speed in high vacuum range | 16 cfm[5] | — |
| Primary turbo drag pump | MDP-5011[3] | — |
| Primary turbo drag pump inlet flange | DN-63-ISO[3] | — |
| Rotation speed | 27,000 rpm[5] | — |
| Backing pump | 1 m^3/hr diaphragm pump[5] | — |
| Maximum flow rate | 400 sccm[4] | — |
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