Waferpedia

Comparison ledger

HiPace 300 Turbomolecular Vacuumversus-Mist 850 Electronic Air Filter

Pfeiffer HiPace 300 Turbomolecular Vacuum, Tri -Mist 850 Electronic Air Filter, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
OEMPfeifferTri
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyPfeiffer HiPaceTri -Mist 850 Electronic Air Filter
Cited variants
  • HiPace 300, 24 V DC[1]
  • HiPace 300, 48 V DC[1]
—
Specifications
ConfigurationWith TC 400 Controller Module[2]—
Product typeTurbomolecular vacuum pump[3]—
Electronic drive unitTC 400[1]—
Operating voltage, 24 V DC variant24 ± 5% V DC[1]—
Operating voltage, 48 V DC variant48 ± 5% V DC[1]—
Maximum power consumption, 24 V DC variant300 W[1]—
Maximum current consumption, 24 V DC variant12.5 A[1]—
Run-up time, 24 V DC variant1.8 min[1]—
Maximum power consumption, 48 V DC variant400 W[1]—
Maximum current consumption, 48 V DC variant8.4 A[1]—
Run-up time, 48 V DC variant1.2 min[1]—
Weight, ISO-K6.7 kg[1]—
Weight, ISO-F7 kg[1]—
Weight, CF-F8.7 kg[1]—
HV flangeDN 100 ISO-K, DN 100 ISO-F, or DN 100 CF-F[1]—
Cooling methodStandard water, optional air[1]—
Cooling water temperature15-35 °C[1]—
Cooling water consumption50 l/h[1]—
InterfacesRS-485, Remote[1]—
Ultimate pressure with On Tool DryPump<1·10⁻⁷ mbar[1]—
Rotation speed60000 rpm (variable 20-100%)[1]—
Sound pressure level≤ 50 dB (A)[1]—

Plan your fab

Building a Lab & Support Equipment process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]manualslib.commanualslib.com
  2. [2]inventory listing
  3. [3]pfeiffervacuum.compfeiffervacuum.com