Comparison ledger
Pfeiffer TPH 170 Turbomolecular Vacuum, Tri -Mist 850 Electronic Air Filter, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | TPH 170 Turbomolecular VacuumPfeiffer | |
|---|---|---|
| OEM | Pfeiffer | Tri |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Pfeiffer TPH | Tri -Mist 850 Electronic Air Filter |
| Specifications | ||
| Volume flow rate | 170[1] | — |
| Configuration | Humming sound when running[1] | — |
| Voltage | 110V[1] | — |
| OEM | Pfeiffer Vacuum / Balzers[2] | — |
| Model | TPH 170[2] | — |
| Pumping speed (N2) | 170 L/s[2] | — |
| Inlet port flange | DN 100 ISO-K (Claw clamp)[2] | — |
| Exhaust/foreline port | DN 25 ISO-KF[2] | — |
| Vent port | DN 10 ISO-KF[2] | — |
| Cooling method | Water cooling standard / Convertible to forced air[2] | — |
| Recommended controllers | Pfeiffer TCP 121, TCP 300, TCP 310, TCS 302[2] | — |
| Recommended backing pump | Uno/Duo 004B, Duo 016B, or equivalent 2-stage rotary vane pump[2] | — |
| Weight | ~7.25 kg (16 lbs)[2] | — |
| Part number | PM P01 210 / PMP01210A[2] | — |
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