Comparison ledger
Plasma-Therm VLR, Tenney , TPS JR-A-F4T Junior compact temperature test chambers, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | VLRPlasma-Therm | |
|---|---|---|
| OEM | Plasma-Therm | Tenney |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Plasma-Therm VLR | Tenney , TPS JR-A-F4T Junior compact temperature test chambers |
| Specifications | ||
| Configuration | With PECVD Module System & disconnected box[1] | — |
| Make | Plasmatherm[1] | — |
| Model | VLR[1] | JR-A-F4T[3] |
| Asset description | Plasmatherm VLR Handler - With PECVD Module System & disconnected box[1] | — |
| Related process-control reference | Unaxis VLR Dep / Unaxis VLR Etch[2] | — |
| OEM | Plasma-Therm[1] | — |
| Equipment type | Handler[1] | — |
| Chamber Size | — | 1.2 cubic feet[3] |
| Temperature Range | — | -68°C to +180°C[3] |
| Control | — | +/-1.0°C[3] |
| Manufacturer | — | Tenney[3] |
| Short description | — | Junior compact temperature test chambers[3] |
| Control accuracy | — | +/-1.0°C[3] |
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