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03 RR 8120-001-001 Wafer ExchangerversusNS 6040 High Speed

Rorze 03 RR 8120-001-001 Wafer Exchanger, Seiko Epson NS 6040 High Speed, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMRorzeSeiko Epson
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyRorze 03 RR 8120-001-001 Wafer ExchangerSeiko Epson NS 6040
Specifications
Wafer size8 inch[1]—
ManufacturerRorze[1]—
Model03 RR 8120-001-001[1]—
Equipment typeWafer Exchanger[1]—
Voltage—220 VAC (Single Phase)[3]
Configuration—50/60HZ, 6KVA max[3]
Temperature—Hot 125°C & Ambient 25°C[4]
Power consumption—6 kVA max[3]
Air pressure—0.49 MPa[3]
Main axis motor—400W AC servo[3]
I/O arm axis motor—100W AC servo[3]
Z axis motor (first)—2W stepping[3]
X axis motor—200W AC servo[3]
U axis motor—200W AC servo[3]
Z axis motor (second)—200W AC servo[3]
Shuttle motor—100W AC servo[3]
Tray handling robot motor—100W AC servo[3]
Tray loader/unloader motor—6W induction[3]
Temperature range—Room ambient to 125°C[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]inventory listing