Waferpedia

Comparison ledger

03 RR 8120-001-001 Wafer ExchangerversusOpus 3 SH

Rorze 03 RR 8120-001-001 Wafer Exchanger, Semics Opus 3 SH, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
Opus 3 SHSemics
OEMRorzeSemics
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyRorze 03 RR 8120-001-001 Wafer ExchangerSemics Opus
Cited variants—
Specifications
Wafer size8 inch[2]6 Inches, 8 Inches, 12 Inches[1]
ManufacturerRorze[2]SEMICS Inc[1]
Model03 RR 8120-001-001[2]—
Equipment typeWafer Exchanger[2]—
Configuration—Flat top plate for bigger test head application[4]
Full Load Current—11 A[4]
Max Ampere Rating—25 A[4]
Interruption Capacity—10 kA[4]
Type—Automatic[1]
Accuracy—1 µm[1]
Chuck size—175 x 175 mm[1]
Operating temperature—-40 to 200 Degree C[1]
Overall dimensions—1490 x 1680 x 960 mm[1]
Probing force—450 kgf[1]
Part number—OPUS3 SH[1]
Voltage—200~240 V[4]
Frequency—50/60 Hz[4]
Chuck type—12 inch nickel hot chuck[4]
Ampere rating—15 A[4]
Vintage—2019[4]

Plan your fab

Building a Test & Probe process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]semiconductor.directorysemiconductor.directory
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing